As of January 16, 2007, OnWafer Technologies, Inc. was acquired by KLA-Tencor Corporation. OnWafer Technologies, Inc. manufactures lithography and plasma etch products to the semiconductor industry. The companyÕs products include Baketemp, which allows temperature monitoring of resist track bake plates; Onview data analysis system, a process viewing system; Bakeinfo analysis engine, which tracks the thermal profile of various plates for viewing and identifying excursion events; Autocal, a software application; AutoCD, which pushes the servo point forward; and SmartFOUP that contains sealed on-board diagnostics systems. Its mobile metrology solutions feature wireless, wafer-based sensors, software, and optimization programs to monitor, measure, and tune process results. The company was founded in 2000 and is based in Santa Clara, California.
OnWafer Technologies, Inc. and SensArray Corporation were acquired by KLA-Tencor for $53 million in cash in 2007.